In this paper, the integration of HfO(2) onto SiC has been investigated via a number of different test structures. These are cookies that have not yet been categorized. Age 80+ ( ) - View cell phone number.
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The new HfO(2)/Si/SiC capacitors provide the greatest breakdown electric field of 3.5 MV/cm, whilst leakage currents are minimised through the insertion of the narrow bandgap material.
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